金刚石纳米粉促进的CVD金刚石薄膜的生长行为研究

无机材料学报

金刚石纳米粉促进的CVD金刚石薄膜的生长行为研究

邵乐喜¹; 刘小平¹; 谢二庆²; 贺德衍²; 陈光华³

1. 湛江师范学院物理系, 广东湛江 524048; 2. 兰州大学物理科学与技术学院, 兰州 930000; 3. 北京工业大学材料科学与工程学院, 北京 100022

收稿日期:2001-02-05 修回日期:2001-02-28 出版日期:2002-01-20 网络出版日期:2002-01-20

Growth Behavior of CVD Diamond Films Promoted by Nanosized

SHAO Le-Xi¹; LIU Xiao-Ping¹; XIE Er-Qing²; HE De-Yan²; CHEN Guang-Hua³

1. Department of Physics; Zhanjiang Normal College; Zhanjiang 524048; China; 2. School of Physics Science and Technology; Lanzhou University; Lanzhou 73000; 3. School of Material Science and Engineering , Beijing Polytechnic University, Beijing 100022, China

Received:2001-02-05 Revised:2001-02-28 Published:2002-01-20 Online:2002-01-20

摘要/Abstract

摘要： 采用由普通炸药爆轰制备的金刚石纳米粉对光滑硅衬底进行了涂覆预处理，研究了金刚石薄膜经徐覆和研磨预处理的两种衬底上的生长行为及其演化过程．结果表明，纳米粉处理能在显著提高成核密度的同时，大大缩短长成连续膜所用的时间；薄膜的生长由前后相继的两个阶段所构成，即确定晶面形成前球状颗粒的成长与融合和晶面的逐渐显露与晶粒长大过程．经足够长的生长时间后，所得薄膜具有结构致密、晶面清晰、晶形完整和表面平整度高的特征，特别适合于高致密性自支持薄膜的生长．而研磨处理衬底上生长的薄膜一旦成核，便有确定晶面的显露，但却出现明显的二次成核和孪晶，所得薄膜的致密性与表面平整度均不及徐覆处理的好．文中还对结果进行了简要讨论．

关键词: 金刚石纳米粉, CVD金刚石薄膜, 生长行为

Abstract: The nanosized diamond powder, synthesized by explosive detonation was used as the coating material on substrates for the purpose of promoting the nucleation
and growth of CVD diamond films. Experiments show that in comparison with the scratching pretreatment with ～μm diamond particles, the nanosized diamond
coating pretreatment not only can make nucleation density higher and more homogeneous, but shorten the growth time for the formation of a continuous film. The growth process
of the films is composed of sequential two stages. The first is the growth and association of sphere shaped particles before the appearance of any facet, the second is the gradual emergence
of facets and the growth of the crystalline grain with certain facets. The films made by this pretreatment possess the following outstanding properties, such as
compact structure, low surface roughness, fine facets and high crystalline quality. In contrast, once the films deposited on the scratched substrate are nucleated,
the certain facets emerge without the former stage mentioned above, but there exist significant second nucleation on them.

Key words: nanosized diamond powder, CVD diamond thin films, growth behavior

中图分类号:

O484

邵乐喜,刘小平,谢二庆,贺德衍,陈光华. 金刚石纳米粉促进的CVD金刚石薄膜的生长行为研究[J]. 无机材料学报.

SHAO Le-Xi,LIU Xiao-Ping,XIE Er-Qing,HE De-Yan,CHEN Guang-Hua. Growth Behavior of CVD Diamond Films Promoted by Nanosized[J]. Journal of Inorganic Materials.