液相电沉积类金刚石薄膜的相关物理化学问题

无机材料学报

液相电沉积类金刚石薄膜的相关物理化学问题

酒金婷^1,2; 付强²; 汪浩²; 朱鹤孙²

1. 北京服装学院材料工程系, 北京 100029; 2. 北京理工大学材料中心, 北京 100081

收稿日期:2001-04-17 修回日期:2001-06-20 出版日期:2002-05-20 网络出版日期:2002-05-20

Aroused Problems in the Deposition of Diamond-like Carbon Films by Using the Liquid Phase Electrodeposition Technique

JIU Jin-Ting^1,2; FU Qiang²; WANG Hao²; ZHU He-Sun²

1. Department of Material and Engineering; Beijing Institute of Clothing Technology; Beijing 100029. China; 2. Research Center of Materials Science; Beijing Institute of Technology; Beijing 100081; China

Received:2001-04-17 Revised:2001-06-20 Published:2002-05-20 Online:2002-05-20

摘要/Abstract

摘要： 利用液相电沉积技术制备了含氢类金刚石薄膜(ＤＬＣ);讨论了应用电位和沉积碳源对沉积过程和薄膜结构的影响;结果表明有高介电常数、低粘度、分子中甲基基团直接与极性基团键合的有机液体是合适的沉积碳源;通过增加沉积电位将有利于薄膜中ｓｐ^３碳的生长;最后,作者提出了液相沉积类金刚石薄膜的反应机理－极化－反应机制,在电场的作用下,有机分子被极化并在电极表面反应生成ＤＬＣ薄膜和其他产物．

关键词: DLC薄膜, 液相电沉积, 碳源, 反应机理

Abstract: Hydrogenated diamond-like carbon (DLC) films were prepared by using a liquid phase electrodeposition technique. The effect of
applied potential and carbon sources on the deposition process and film structures were studied. The results show that the organic liquids with high dielectric constants, small
viscosities and the methyl group bonding to the polar group are appropriate carbon sources. The increasing potential can improve the formation of sp³carbon during the deposition
process. In a high electric field, organic molecules are polarized and react on the surface of the electrode, turning into DLC and other products. The authors believed that the reaction
follows a polarization-reaction mechanism.

Key words: DLC films, liquid electrodeposition, carbon source, mechanism

中图分类号:

O647

酒金婷,付强,汪浩,朱鹤孙. 液相电沉积类金刚石薄膜的相关物理化学问题[J]. 无机材料学报.

JIU Jin-Ting,FU Qiang,WANG Hao,ZHU He-Sun. Aroused Problems in the Deposition of Diamond-like Carbon Films by Using the Liquid Phase Electrodeposition Technique[J]. Journal of Inorganic Materials.

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