关键词: 非晶金刚石薄膜, 拉曼光谱, 表面形貌

Abstract: The ion energy is a crucial parameter for amorphous diamond films deposition. Amorphous diamond
films (a-D) were prepared by magnetic field filtered plasma stream system. The Raman spectroscopy and surface morphology of a-D films deposited at various substrate bias voltages V_b were studied. The
results show that a-D films, deposited at V_b in the range from --10V to --50V, have a single and nearly symmetric very broad Raman
peak range from 1200cm^-1 to 1800cm^-1. The surface morphology of these films is very smooth and uniform. However, for samples deposited
at V_b>-10V or V_b<-50V, the Raman spectra exhibit two broad peaks centered approximately at 1350cm^-1(D peak) and 1580cm^-1(G peak), and the surface roughness will be increases.

Key words: amorphous diamond films, Raman spectra, surface morphology