溶胶-凝胶法制备NiO掺杂CaCu3Ti4O12薄膜
徐东1,2, 宋琪1, 张柯1, 徐红星1, 杨永涛1, 于仁红3
1. 江苏大学 材料科学与工程学院, 镇江 212013
2. 电子科技大学 电子薄膜与集成器件国家重点实验室,成都610054
3. 常州明尔瑞陶瓷有限公司, 常州213102
摘要

用溶胶-凝胶法制备纯CaCu3Ti4O12(CCTO)薄膜以及NiO掺杂CaCu3-xNixTi4O12(CCNTO)薄膜(x=0.10、0.20、0.30),研究了掺杂NiO对CCTO介电性能以及微观结构的影响。通过AFM图片可以看出,掺杂NiO的CCTO薄膜的晶粒尺寸比不掺杂NiO的CCTO薄膜的晶粒尺寸小。当x=0.2时,CCNTO薄膜的漏电流最小,最小值为0.546 mA,同时具有最大阈值电压与最大非线性系数,最大值分别为81 V/mm 和1.9。当Ni掺杂量达到一定程度时,CCNTO薄膜的介电常数就会增加,总体来说,随着Ni的掺杂量增加,CCNTO薄膜的介电损耗呈上升趋势。

关键词: 钛酸铜钙; 溶胶-凝胶法; 电性能; 显微组织
中图分类号:TQ174   文献标志码:A    文章编号:1000-324X(2013)11-1270-05
NiO-doped CaCu3Ti4O12 Thin Film by Sol-Gel Method
XU Dong1,2, SONG Qi1, ZHANG Ke1, XU Hong-Xing1, YANG Yong-Tao1, YU Ren-Hong3
1. School of Material Science and Engineering, Jiangsu University, Zhenjiang 212013, China
2. State key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
3. Changzhou Ming Errui Ceramics Co., Ltd., Changzhou 213102, China

XU Dong, PhD, associate professor. E-mail:frankxud@126.com

Abstract

Pure CaCu3Ti4O12 (CCTO) thin film and NiO-doped CaCu3-xNixTi4O12 (CCNTO) thin film withx=0.10, 0.20 and 0.30 were prepared by Sol-Gel method. The effects of NiO on the dielectric properties and microstructure revolution of CCTO were studied. The crystalline structure and the surface morphology of the films were markedly influenced by NiO content. AFM images of the CaCu3-xNixTi4O12 samples showed that the grain size of Ni-doped CCTO was smaller than the grain size of CCTO without Ni doping. For the CCNTO thin film(x=0.2), the lowest leakage current was obtained and the minimum value reached 0.564 mA. Meanwhile, the highest threshold voltage and nonlinear coefficient were 81 V/mm and 1.9, respectively. The dielectric constant increased when the doping content of Ni reached a certain level. Besides, the dielectric loss was decreased firstly, and then increased.

Keyword: CaCu3Ti4O12; Sol-Gel; electrical properties; microstructure

In recent years, as the electronic industry towards the direction of miniaturization, environmental protection, integration and low cost, the kind of perovskite structure of the CaCu3Ti4O12 (CCTO) has become the focus of research because of its high dielectric constant, low dielectric loss, good thermal stability, low sintering temperature and excellent properties.

The huge dielectric constant of calcium copper titanate (CCTO) ceramic materials was discovered and reported by Subramanian in 2000[ 1]. That CCTO had remarkably strong nonlinear current-voltage characteristics without dopant was demonstrated by Chung, et al[ 2] in 2004. Homes, et al[ 3] discovered that the relative dielectric constant, εr, of single crystalline CaCu3Ti4O12 was close to 105 at frequencies below 20 kHz at 250 K. Furthermore, CCTO film materials were also found with very high dielectric constant. The CCTO is very sensitive to processing parameters which can affect its electrical properties such as dielectric constant. Extensive investigations have been made to identify the origin of the colossal dielectric property of CCTO[ 4, 5, 6, 7, 8], whereas the nature and the origin of the giant dielectric constant of CCTO ceramics remain controversial. So far, researchers have put forward to all sorts of models to elucidate the phenomenon of the giant dielectric, such as mechanisms of polarization, Maxwell-Wagner relaxations. Among them, the internal barrier layer capacitor (IBLC) effect which has been generally accepted as a well-founded explanation for the origin of the giant permittivity. Some studies have dealt with CCTO thin films grown by pulsed laser deposition (PLD), metal organic chemical vapor deposition, Sol-Gel and RF magnetron sputtering[ 9, 10, 11]. Compared with the traditional methods, the Sol-Gel method has many advantages, such as simple process, no pollution, low energy consumption, and obtaining the higher degree (molecular scale) uniformity[ 12, 13, 14]. Therefore, the Sol-Gel method was used in this study. Moreover, in the present form of CCTO materials, researches mainly focus on doping modification, and trying to further improve the dielectric properties. Doping is the common method in materials research.

The electrical properties can be greatly affected by appropriate doping and elements substitution. NiO is a kind of high dielectric material, however Ni-doped CCTO ceramics have not been reported previously. Therefore, we use the Sol-Gel method to prepare NiO-doped CCTO thin film, and investigate the influences of the Ni content on the microstructure and dielectric properties of CCTO.

1 Experimental procedure

Sol-Gel method was used to prepare the precursor of CaCu3Ni xTi4O12+ x, for x=0, 0.1, 0.2, 0.3 (samples labeled CB0, CB1, CB2 and CB3, respectively). Reagent-grade raw materials were calcium acetate [Ca(CH3COO)2•H2O], copper nitrate [Cu(NO3)2•3H2O], Ni(NO3)2 and tetrabutyl titanate [Ti(OC4H9)4]. Firstly, an appropriate amount of Ca(CH3COO)2•H2O, Cu(NO3)2•3H2O, Ni(NO3)2 and Ti(OC4H9)4 in the stoichiometric ratio were dissolved in ethanol separately with some glacial acetic acid. Secondly, proper amount of deionized water and little amount nitric acid were added when the sol was stirred. After continual stirring for about 20 min, a cyan precursor sol was obtained. And then, the precursor sol aged for 30 h. Thirdly, CCTO thin films were deposited on Si substrate by dip-coating technique. Finally, CCTO thin film samples were annealed at 900℃ for 1 h with a heating rate of 5 ℃/min.

For the characterization of electrical properties, the silver paste was coated on the face of samples, and the silver electrodes were formed by heating at 600℃ for 10 min. The silver electrodes were 5 mm in diameter. The voltage-current ( V- I) characteristics were measured using a V- I source/measure unit (CJP CJ1001). The nominal varistor voltages ( VN) at 0.1 and 1.0 mA were measured and the threshold voltage was at VT (V/mm) ( VT = VN (1 mA)/ d; d is the thickness of the sample in mm)[ 15, 16, 17]. The leakage current ( IL) was measured at 0.75 VN (1 mA). The measurement accuracy for voltage was ± 0.5% and for electric current was ±2%[ 18, 19, 20, 21]. In addition, the nonlinear coefficient α( α=1/lg( V1.0 mA/ V0.1 mA)) was determined with relative error of ±5%[ 22, 23, 24]. The crystalline phases were identified by X-ray diffraction (XRD, Rigaku D/max 2500, Japan) using a Cu Kα radiation. The dielectric characteristics, such as the apparent dielectric constant ( εr) and dissipation factor (tan δ) at different frequencies were measured by an HP4294A impedance analyzer (Agilent). The microstructures were evaluated by Atomic Force Microscope (SPM, SPA400, Seiko, Japan).

2 Results and discussion

Figure 1 shows the AFM images of Ni-doped CCTO films with different Ni contents. It is apparent that the grain size of CCTO without Ni doped is larger than that with Ni doped. The average grain size decreases gradually with the increase of Ni content, With the Ni content increase, the roughness of film surface firstly increases and then decreases when x>0.1 (Table 1), which indicates that doping properly with NiO can further inhibit the growth of CCTO grains in the sintering process.

Fig. 1 AFM images of the surface of Ni-doped CCTO films

Table 1 Roughness characterization of the surface of Ni-doped CCTO films

Figure 2 shows XRD patterns of the CCTO films with different dopant content. These patterns are essentially similar to that of undoped CCTO films. XRD data was indexed on the basis of a cubic unit cell which was similar to CCTO. The formation of CaCu3Ti4O12 cubic phase belonging to the Im-3 space group (ICDD 75-2188) is apparent and reflections (220), (400) and (422) of CaCu3Ti4O12 phase are identified for the Ni-doped CCTO films. Inaddition, the peaks of TiO2and CaTiO3 indicate that there are TiO2 phase in all samples. That tetrabutyl titanate is not pure probably leads to the existence of TiO2 phrase. The XRD peaks intensify with the increasing of Ni doping content, which suggest that dopant promotes the formation of the main crystalline phase of CCTO.

Fig. 2 XRD patterns of various Ni-doped CCTO film

Figure 3 illustrates the dielectric constant and dielectric loss in frequency ranging from 1 kHz to 10 MHz at room temperature. The εr of the pure CCTO is about 26000 at 1 kHz. The dielectric constant decreases firstly and then increases with the increase of the Ni doping content. When x=0.1 and 0.2, the dielectric constant of NiO-doped CCTO is smaller than CCTO without NiO. When x=0.3, the dielectric constant of NiO-doped CCTO is much higher than others. Furthermore, the dielectric constant decreases with the frequency increases. According to the previous work[ 7], the larger grain size will help to obtain a higher dielectric constant. In Fig. 3(b), the dielectric loss decreases firstly and then increases and the relaxation peak tends to move towards low frequency with the content of NiO increase. The dielectric loss in low frequency area is closely connected with leakage current of CCTO. The dielectric loss greatly increases with the content of NiO increase. Due to the addition of NiO, the carrier density in CCTO greatly increases, and the carrier in CCTO is electronic. Because Ni2+ replaces the position of Cu2+, the content of CuO decreases, which leads to significant increase of the electronic concentration.

Fig. 3 Frequency dependence of (a) dielectric constant and (b) dielectric loss in Ni-doped CCTO films measured at room temperature

XPS analysis was carried out to investigate the valence states of ions in CCTO films. Figure 4 shows the XPS spectra of O1s, Ca2p, Ti2p, Cu2p and Ni2p. The shift of core-level spectra due to charging effect is calibrated using the contaminated C1s peak located at 285 eV. O1s peak of CBO without Ni doped can be spitted into two peaks from Figure 4(a). One is due to Cu-O bonds and the other is due to Ca-O bonds. Ni-O bonds are found in the O1s of CB1, CB2, CB3 with Ni doped. The XPS spectra of Ca2p, Ti2p, Cu2p and Ni2p are shown respectively in Figure 4 (b), (c), (d) and (e). It reveals that the presence of calcium in +2 oxidation state is clear from the shape, the symmetry of the peak and the bonding energy of Ca2p in (b). The XPS patterns of Ti2p are shown in Figure 4 (c). It is clear that titanium is in the +4 state. The presence of titanium in +4 state is evident from the shape, the symmetry of the peak and the bonding energy of Ti2p. Small amounts of Cu+ are found in the Cu2p. The presence of copper in +1 and + 2 was clear from Figure 4 (d). Figure 4(e) shows the XPS spectra of Ni2p. It is revealed that the presence of nickel in +2 oxidation state is clear from the shape, the symmetry of the peak and the bonding energy of Ni2p in Figure 4 (e). And the graph of O1s in Figure 4 (a) presents that the nickel divalent combines with O ions to form the Ni-O bonds.

Fig. 4 XPS spectra of Ni-doped CCTO films(a) O1s; (b) Ca2p; (c) Ti2p; (d) Cu2p; (e) Ni2p

As can be seen from Table 2, Ni doping shows remarkable influences on the nonlinear current-voltage properties of CCTO samples. With increasing Ni content, the leakage current firstly increases and then decreases, while nonlinear coefficient and threshold voltage present an opposite tendency. When x=0.2, the lowest leakage current is obtained and the minimum value reaches to 0.564; meanwhile, the highest threshold voltage and nonlinear coefficient are 81 V/mm and 1.9, respectively. Sample CB2 displays good varistor properties which exhibits the lowest leakage current, and shows better nonlinear V- I characteristics than that of other samples. It can be accounted for that Ni doping increases CCTO grain boundary barrier, leads to nonlinear coefficient and threshold voltage rising up, and leakage current reduction. All things considered, the optimal varistor characteristic of the films was shown in the sample of x=0.2.

Table 2 Electrical properties of Ni-doped CCTO films
3 Conclusions

The CaCu3- xNi xTi4O12 ( x=0, 0.1, 0.2, 0.3) thin films were prepared by Sol-Gel method and dip-coating technique. The crystalline structure and the surface morphology of the films were markedly influenced by various NiO content. From AFM observations, the grain size of CCTO with Ni doped was smaller than that without Ni doped. In general, it is found that the CaCu2.8Ni0.2Ti4O12 (the sample with x=0.2) has the best properties with the highest nonlinear coefficient and threshold field, which must be accounted for that Ni doping increases CCTO grain boundary barrier, leading to nonlinear coefficient and threshold voltage rising up and leakage current reduction. The dielectric constant increases, when doping content reaches a certain level. The dielectric loss is decreased firstly and then increased. Owing to Ni does not reduce the dielectric loss, researchers can further reduce the loss to expect the promising application prospect of CCTO with NiO.

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